Design rules for self-assembled block copolymer patterns using tiled templates.
نویسندگان
چکیده
Directed self-assembly of block copolymers has been used for fabricating various nanoscale patterns, ranging from periodic lines to simple bends. However, assemblies of dense bends, junctions and line segments in a single pattern have not been achieved by using sparse templates, because no systematic template design methods for achieving such complex patterns existed. To direct a complex pattern by using a sparse template, the template needs to encode the key information contained in the final pattern, without being a simple copy of the pattern. Here we develop a set of topographic template tiles consisting of square lattices of posts with a restricted range of geometric features. The block copolymer patterns resulting from all tile arrangements are determined. By combining tiles in different ways, it is possible to predict a relatively simple template that will direct the formation of non-trivial block copolymer patterns, providing a new template design method for a complex block copolymer pattern.
منابع مشابه
Title: Design Rules for Self-assembled Block-copolymer Patterns Using Tiled-templates
Directed self-assembly of block copolymers has been used for fabricating various nanoscale patterns, ranging from periodic lines to simple bends. However, assemblies of dense bends, junctions, and line segments in a single pattern have not been achieved by using sparse templates, because no systematic template-design methods for achieving such complex patterns existed. To direct a complex patte...
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Templated self-assembly of block copolymers using topographic templates is attractive because it can generate dense nanoscale patterns over a large area with a periodicity down to 10 nm. In our previous work, regular patterns were achieved by using a polystyrene-bpolydimethylsiloxane (PS-b-PDMS) block copolymer and topographic templates . However, more complex block-copolymer patterns required ...
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Templated self-assembly of block copolymers using topographic templates is attractive because it can generate dense nanoscale patterns over a large area with a periodicity down to 10 nm. In our previous work, regular patterns were achieved by using a polystyrene-bpolydimethylsiloxane (PS-b-PDMS) block copolymer and topographic templates . However, more complex block-copolymer patterns required ...
متن کاملRule-based Directed Self-assembly of Circuit-like Block copolymer Patterns
Templated self-assembly of block copolymers using topographic templates is attractive because it can generate dense nanoscale patterns over a large area with a periodicity down to 10 nm. In our previous work, regular patterns were achieved by using a polystyrene-bpolydimethylsiloxane (PS-b-PDMS) block copolymer and topographic templates . However, more complex block-copolymer patterns required ...
متن کاملRule-based Directed Self-assembly of Circuit-like Block copolymer Patterns
Templated self-assembly of block copolymers using topographic templates is attractive because it can generate dense nanoscale patterns over a large area with a periodicity down to 10 nm. In our previous work, regular patterns were achieved by using a polystyrene-bpolydimethylsiloxane (PS-b-PDMS) block copolymer and topographic templates . However, more complex block-copolymer patterns required ...
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ورودعنوان ژورنال:
- Nature communications
دوره 5 شماره
صفحات -
تاریخ انتشار 2014